Articles | Volume 9, issue 1
https://doi.org/10.5194/jsss-9-15-2020
© Author(s) 2020. This work is distributed under
the Creative Commons Attribution 4.0 License.
the Creative Commons Attribution 4.0 License.
https://doi.org/10.5194/jsss-9-15-2020
© Author(s) 2020. This work is distributed under
the Creative Commons Attribution 4.0 License.
the Creative Commons Attribution 4.0 License.
Regular research article
| 
23 Jan 2020
Regular research article |
| 23 Jan 2020
| 23 Jan 2020
High-temperature stable piezoelectric transducers using epitaxially grown electrodes
Hendrik Wulfmeier
CORRESPONDING AUTHOR
Institute of Energy Research and Physical Technologies, Clausthal
University of Technology, 38640 Goslar, Germany
René Feder
Institute of Energy Research and Physical Technologies, Clausthal
University of Technology, 38640 Goslar, Germany
Li Zhao
Institute of Energy Research and Physical Technologies, Clausthal
University of Technology, 38640 Goslar, Germany
Holger Fritze
Institute of Energy Research and Physical Technologies, Clausthal
University of Technology, 38640 Goslar, Germany
Related authors
Sebastian Schlack, Hendrik Wulfmeier, and Holger Fritze
J. Sens. Sens. Syst., 11, 299–313, https://doi.org/10.5194/jsss-11-299-2022, https://doi.org/10.5194/jsss-11-299-2022, 2022
Short summary
Short summary
High-temperature stable piezoelectric resonators are coated with oxide electrodes. The impact of the oxide electrode conductivity on the mass sensitivity and on the resonance frequency of the device is described by electrical and mechanical models, which are used to analyse the experimental data. Furthermore, the impact of an increasing oxide electrode conductivity is discussed with respect to the application of oxide electrodes and for gas sensing.
Hendrik Wulfmeier, Niklas Warnecke, Luca Pasquini, Holger Fritze, and Philippe Knauth
J. Sens. Sens. Syst., 11, 51–59, https://doi.org/10.5194/jsss-11-51-2022, https://doi.org/10.5194/jsss-11-51-2022, 2022
Short summary
Short summary
A newly developed experimental setup to characterize thin polymeric films during dehydration and hydration is presented. The great advantage of this measurement device and technique is that it monitors the mass change and conductivity of the films in situ and simultaneously at virtually identical conditions. The feasibility of the technique is demonstrated by characterizing ionomer thin films. A mass resolution of ±7.9 ng is achieved. The precision of relative humidity (RH) control is ±0.15 %.
Sebastian Schlack, Hendrik Wulfmeier, and Holger Fritze
J. Sens. Sens. Syst., 11, 299–313, https://doi.org/10.5194/jsss-11-299-2022, https://doi.org/10.5194/jsss-11-299-2022, 2022
Short summary
Short summary
High-temperature stable piezoelectric resonators are coated with oxide electrodes. The impact of the oxide electrode conductivity on the mass sensitivity and on the resonance frequency of the device is described by electrical and mechanical models, which are used to analyse the experimental data. Furthermore, the impact of an increasing oxide electrode conductivity is discussed with respect to the application of oxide electrodes and for gas sensing.
Fabian Kohler, Monika Farina, Michal Schulz, Holger Fritze, and Jürgen Wilde
J. Sens. Sens. Syst., 11, 83–97, https://doi.org/10.5194/jsss-11-83-2022, https://doi.org/10.5194/jsss-11-83-2022, 2022
Short summary
Short summary
This work shows a possibility of assembly and connection technology for use under high temperatures up to 1000 °C. A packaging concept was developed, and all the necessary material and joining technologies have been verified to be suitable for use at 1000 °C. A working sensor was built and measured in comparison to the resonator alone. All packaging materials and structures were measured electrically and dielectrically. Equivalent circuits for the packages up to 2 MHz and 1000 °C are available.
Hendrik Wulfmeier, Niklas Warnecke, Luca Pasquini, Holger Fritze, and Philippe Knauth
J. Sens. Sens. Syst., 11, 51–59, https://doi.org/10.5194/jsss-11-51-2022, https://doi.org/10.5194/jsss-11-51-2022, 2022
Short summary
Short summary
A newly developed experimental setup to characterize thin polymeric films during dehydration and hydration is presented. The great advantage of this measurement device and technique is that it monitors the mass change and conductivity of the films in situ and simultaneously at virtually identical conditions. The feasibility of the technique is demonstrated by characterizing ionomer thin films. A mass resolution of ±7.9 ng is achieved. The precision of relative humidity (RH) control is ±0.15 %.
Michal Schulz, Rezvan Ghanavati, Fabian Kohler, Jürgen Wilde, and Holger Fritze
J. Sens. Sens. Syst., 10, 271–279, https://doi.org/10.5194/jsss-10-271-2021, https://doi.org/10.5194/jsss-10-271-2021, 2021
Short summary
Short summary
Temperature sensors based on piezoelectric devices enable precise measurement of temperature changes in harsh environments such as high temperatures or aggressive atmospheres. In the case of this device, the change in the temperature is detected by means of the changing resonance frequency of the sensor. Here a sensor device based on catangasite (an isomorph of quartz) is presented. We discuss its behavior at elevated temperatures and confirm that it can successfully operate up to 1030 °C.
Oleh Buryy, Ihor I. Syvorotka, Yuriy Suhak, Uliana Yakhnevych, Dmytro Sugak, Sergii Ubizskii, and Holger Fritze
J. Sens. Sens. Syst., 10, 121–126, https://doi.org/10.5194/jsss-10-121-2021, https://doi.org/10.5194/jsss-10-121-2021, 2021
Short summary
Short summary
The actuators of precise positioning based on LiNbO3 or LiTaO3 bimorph structures are considered. They consist of two joined plates: one of them lengthens and the other one shortens under the influence of an electric field and, as a result, the actuator bends. Such a device ensures small movements of probes in scanning probe microscopes, micro-electromechanical systems, micro-motors, etc. We determine the optimal orientations of the plates, ensuring the highest possible actuator displacements.
Jens Ebel, Carolin Schilling, and Holger Fritze
J. Sens. Sens. Syst., 9, 263–271, https://doi.org/10.5194/jsss-9-263-2020, https://doi.org/10.5194/jsss-9-263-2020, 2020
Short summary
Short summary
In a very specific way, this research paper shows how established systems – in this case a commercial soot sensor for the automotive sector – can be optimized by diving deep into the basic research. The approach here is to link macroscopic observations or signal behavior with processes taking place on the atomic level. Taking these fundamental processes into account, the sensor's specific response time could be shortened effectively by a change in operating strategy – without any design changes.
Michal Schulz, Timna Orland, Alexander Mehlmann, Avner Rothschild, and Holger Fritze
J. Sens. Sens. Syst., 6, 107–119, https://doi.org/10.5194/jsss-6-107-2017, https://doi.org/10.5194/jsss-6-107-2017, 2017
M. Schulz, E. Mayer, I. Shrena, D. Eisele, M. Schmitt, L. M. Reindl, and H. Fritze
J. Sens. Sens. Syst., 4, 331–340, https://doi.org/10.5194/jsss-4-331-2015, https://doi.org/10.5194/jsss-4-331-2015, 2015
Related subject area
Sensor technologies: Sensor materials
Inverse procedure for measuring piezoelectric material parameters using a single multi-electrode sample
Impact of electrode conductivity on mass sensitivity of piezoelectric resonators at high temperatures
Improving the electrical and structural stability of highly piezoresistive nickel–carbon sensor thin films
Impact of particle size and morphology of cobalt oxide on the thermal response to methane examined by thermal analysis
Improvement of the performance of a capacitive relative pressure sensor: case of large deflections
Morphological characterization and porosity profiles of tantalum glancing-angle-deposited thin films
AC characteristics of low-ohmic foil shunts influenced by eddy currents in the mounting body
Three-dimensional structural comparison of tantalum glancing angle deposition thin films by FIB-SEM
Quartz crystal microbalance coated with PEDOT–PSS/PVA nanofiber for a high-performance humidity sensor
Study of different magneto-optic materials for current sensing applications
Voltammetric sensor for electrochemical determination of the floral origin of honey based on a zinc oxide nanoparticle modified carbon paste electrode
Embedded sensing: integrating sensors in 3-D printed structures
Granular metal–carbon nanocomposites as piezoresistive sensor films – Part 1: Experimental results and morphology
High-temperature stable indium oxide photonic crystals: transducer material for optical and resistive gas sensing
Effect of sintering temperature on adhesion of spray-on piezoelectric transducers
Correlation of BAW and SAW properties of langasite at elevated temperatures
Investigating the influence of Al-doping and background humidity on NO2 sensing characteristics of magnetron-sputtered SnO2 sensors
Ammonia storage studies on H-ZSM-5 zeolites by microwave cavity perturbation: correlation of dielectric properties with ammonia storage
Investigation of InAsSbP quantum dot mid-infrared sensors
Increasing the sensitivity of electrical impedance to piezoelectric material parameters with non-uniform electrical excitation
High-temperature piezoresistive C / SiOC sensors
Encapsulation of implantable integrated MEMS pressure sensors using polyimide epoxy composite and atomic layer deposition
Aerosol-assisted CVD synthesis, characterisation and gas-sensing application of gold-functionalised tungsten oxide
Electrophoretic deposition of Au NPs on CNT networks for sensitive NO2 detection
A catalytic combustion-type CO gas sensor incorporating aluminum nitride as an intermediate heat transfer layer for accelerated response time
Polymer composite based microbolometers
Leander Claes, Nadine Feldmann, Veronika Schulze, Lars Meihost, Henrik Kuhlmann, Benjamin Jurgelucks, Andrea Walther, and Bernd Henning
J. Sens. Sens. Syst., 12, 163–173, https://doi.org/10.5194/jsss-12-163-2023, https://doi.org/10.5194/jsss-12-163-2023, 2023
Short summary
Short summary
This article describes a method to measure the parameters of piezoelectric materials. This is done by evaluating the complex electrical resistance of a sample. However, the properties of the material can not be calculated directly from the electrical resistance. Instead, a simulation model of the sample is created, and the parameters of the simulation model are adapted using an optimisation algorithm until the model's resistance and the resistance of the physical sample match.
Sebastian Schlack, Hendrik Wulfmeier, and Holger Fritze
J. Sens. Sens. Syst., 11, 299–313, https://doi.org/10.5194/jsss-11-299-2022, https://doi.org/10.5194/jsss-11-299-2022, 2022
Short summary
Short summary
High-temperature stable piezoelectric resonators are coated with oxide electrodes. The impact of the oxide electrode conductivity on the mass sensitivity and on the resonance frequency of the device is described by electrical and mechanical models, which are used to analyse the experimental data. Furthermore, the impact of an increasing oxide electrode conductivity is discussed with respect to the application of oxide electrodes and for gas sensing.
Günter Schultes, Mario Cerino, Angela Lellig, and Marcus Koch
J. Sens. Sens. Syst., 11, 137–147, https://doi.org/10.5194/jsss-11-137-2022, https://doi.org/10.5194/jsss-11-137-2022, 2022
Short summary
Short summary
We develop sensor material to effectively transform mechanical force or torque into an electrical resistance. A new type of thin films containing nickel and carbon has a significantly higher output and is thus very advantageous. But so far, the electrical resistance lacks stability. We therefore investigate how to stabilize the material and show that the partial replacement of nickel by the element chromium solves the problem. The optimized sensor films are now suitable for widespread use.
Olena Yurchenko, Hans-Fridtjof Pernau, Laura Engel, Benedikt Bierer, Martin Jägle, and Jürgen Wöllenstein
J. Sens. Sens. Syst., 10, 37–42, https://doi.org/10.5194/jsss-10-37-2021, https://doi.org/10.5194/jsss-10-37-2021, 2021
Short summary
Short summary
Differential thermal analysis (DTA) was used to examine the effect of the particle size and morphology of Co3O4 on its thermal response under exposure to 1 % CH4. The DTA response results from the catalytic oxidation of methane. Co3O4 samples differing in particle size and morphology were produced by ball milling or were synthesized. The investigations performed with temperatures between 250 and 450 °C reveal that both particle size and shape have a considerable effect on thermal response.
Samia Achouch, Fakhita Regragui, and Mourad Gharbi
J. Sens. Sens. Syst., 9, 401–409, https://doi.org/10.5194/jsss-9-401-2020, https://doi.org/10.5194/jsss-9-401-2020, 2020
Tobias Ott and Gerald Gerlach
J. Sens. Sens. Syst., 9, 79–87, https://doi.org/10.5194/jsss-9-79-2020, https://doi.org/10.5194/jsss-9-79-2020, 2020
Mario Schönecker-Baußmann
J. Sens. Sens. Syst., 8, 329–333, https://doi.org/10.5194/jsss-8-329-2019, https://doi.org/10.5194/jsss-8-329-2019, 2019
Short summary
Short summary
We came across some problems with the current measurement shunts while building a transfer normal power analyzer for 150 kHz within a cooperation project of the manufacturer ZES ZIMMER along with PTB, the National Metrology Institute of Germany and Bundesnetzagentur Berlin. We decided to utilize simulations with the numerical field simulation program Fast Henry to determine the cause of this frequency behavior. We found adequate justification and give recommendations for the shunt manufacturing.
Tobias Ott, Diego Roldán, Claudia Redenbach, Katja Schladitz, Michael Godehardt, and Sören Höhn
J. Sens. Sens. Syst., 8, 305–315, https://doi.org/10.5194/jsss-8-305-2019, https://doi.org/10.5194/jsss-8-305-2019, 2019
Short summary
Short summary
Thin tantalum films generated by glancing angle deposition serve as functional optical layers. Serial sectioning by a focused ion beam combined with scanning electron microscopy of the slices generates stacks of highly resolved images of this film. Dedicated image processing reconstructs the spatial structure such that 3-D image analysis yields geometric information that can be related to the optical performance.
Trisna Julian, Aditya Rianjanu, Shidiq Nur Hidayat, Ahmad Kusumaatmaja, Roto Roto, and Kuwat Triyana
J. Sens. Sens. Syst., 8, 243–250, https://doi.org/10.5194/jsss-8-243-2019, https://doi.org/10.5194/jsss-8-243-2019, 2019
Short summary
Short summary
High-performance relative humidity (RH) sensing system using poly(3,4-ethylenedioxythiophene) and polystyrene sulfonate mixed with polyvinyl alcohol (PEDOT–PSS/PVA) nanofiber coated on top of a quartz crystal microbalance (QCM) chip is developed. Results show that the sensor offers easy fabrication processes and provides excellent sensor characteristics to relative humidity sensing. It offers a very promising alternative method to fabricate high-performance relative humidity sensors.
Sarita Kumari and Sarbani Chakraborty
J. Sens. Sens. Syst., 7, 421–431, https://doi.org/10.5194/jsss-7-421-2018, https://doi.org/10.5194/jsss-7-421-2018, 2018
Short summary
Short summary
This article discusses the properties of different diamagnetic and paramagnetic materials for a basic current/magnetic field sensor system set up with different relative orientations of analyzers and polarizers. The paper analyzes a linearity range of different materials and their sensitivity for different wavelengths. Terbium doped glass, terbium gallium garnet, doped TGG and dense flint glass materials are used for analysis based on the Faraday rotation principle.
Kamalika Tiwari, Bipan Tudu, Rajib Bandyopadhyay, Anutosh Chatterjee, and Panchanan Pramanik
J. Sens. Sens. Syst., 7, 319–329, https://doi.org/10.5194/jsss-7-319-2018, https://doi.org/10.5194/jsss-7-319-2018, 2018
Alexander Dijkshoorn, Patrick Werkman, Marcel Welleweerd, Gerjan Wolterink, Bram Eijking, John Delamare, Remco Sanders, and Gijs J. M. Krijnen
J. Sens. Sens. Syst., 7, 169–181, https://doi.org/10.5194/jsss-7-169-2018, https://doi.org/10.5194/jsss-7-169-2018, 2018
Short summary
Short summary
Current additive manufacturing allows for the implementation of electrically integrated 3-D printed sensors. In this contribution various technologies, sensing principles and applications are discussed. We will give both an overview of some of the sensors presented in literature as well as some of our own work on recent 3-D printed sensors.
Günter Schultes, Hanna Schmid-Engel, Silvan Schwebke, and Ulf Werner
J. Sens. Sens. Syst., 7, 1–11, https://doi.org/10.5194/jsss-7-1-2018, https://doi.org/10.5194/jsss-7-1-2018, 2018
Short summary
Short summary
This research is about future sensor devices for force, pressure, and weight. The core of such sensors for mechanical quantities is a thin film that reacts to deformation. We are developing new sensor films with higher output. Different compositions of metal containing carbon films are examined. Most preferable and stable films contain nickel and carbon. The microscopic film morphology is uncovered. Electron tunneling between nanoparticles is responsible for the very sensitive reaction.
Sabrina Amrehn, Xia Wu, and Thorsten Wagner
J. Sens. Sens. Syst., 5, 179–185, https://doi.org/10.5194/jsss-5-179-2016, https://doi.org/10.5194/jsss-5-179-2016, 2016
Short summary
Short summary
Indium oxide inverse opal is a promising new material for optical gas sensors. The photonic properties caused by the inverse opal structure can be utilized to read out the sensors’ electronical state by optical methods. The maintenance of good thermal stability of transducer material during operation is a minimum requirement. We present results on the synthesis and investigation of the structural stability of the In2O3 inverse opal structure up to a temperature of 550 °C (limit of substrate).
Kyle M. Sinding, Alison Orr, Luke Breon, and Bernhard R. Tittmann
J. Sens. Sens. Syst., 5, 113–123, https://doi.org/10.5194/jsss-5-113-2016, https://doi.org/10.5194/jsss-5-113-2016, 2016
Short summary
Short summary
This paper investigates the effect of high-temperature and low-temperature (< 150 °C) processing conditions on the surface composition of the substrate. Furthermore, the resultant transducers from high- and low-temperature fabrication processes are compared to determine if a low-temperature processing method is feasible. For these studies a sol-gel spray-on process is employed to deposit piezoelectric ceramics onto a stainless-steel 316L substrate.
M. Schulz, E. Mayer, I. Shrena, D. Eisele, M. Schmitt, L. M. Reindl, and H. Fritze
J. Sens. Sens. Syst., 4, 331–340, https://doi.org/10.5194/jsss-4-331-2015, https://doi.org/10.5194/jsss-4-331-2015, 2015
A. A. Haidry, N. Kind, and B. Saruhan
J. Sens. Sens. Syst., 4, 271–280, https://doi.org/10.5194/jsss-4-271-2015, https://doi.org/10.5194/jsss-4-271-2015, 2015
M. Dietrich, D. Rauch, U. Simon, A. Porch, and R. Moos
J. Sens. Sens. Syst., 4, 263–269, https://doi.org/10.5194/jsss-4-263-2015, https://doi.org/10.5194/jsss-4-263-2015, 2015
Short summary
Short summary
The effect of stored ammonia on the complex dielectric permittivity of H-ZSM-5 zeolites with varying storage site density was observed between 200 and 300 °C under reaction conditions by microwave cavity perturbation. Polarization and dielectric losses were differently affected. The sensitivity of the polarization to stored ammonia is almost independent, the sensitivity of the dielectric losses strongly dependent on the storage site density. The results can be explained by proton hopping.
V. G. Harutyunyan, K. M. Gambaryan, V. M. Aroutiounian, and I. G. Harutyunyan
J. Sens. Sens. Syst., 4, 249–253, https://doi.org/10.5194/jsss-4-249-2015, https://doi.org/10.5194/jsss-4-249-2015, 2015
K. Kulshreshtha, B. Jurgelucks, F. Bause, J. Rautenberg, and C. Unverzagt
J. Sens. Sens. Syst., 4, 217–227, https://doi.org/10.5194/jsss-4-217-2015, https://doi.org/10.5194/jsss-4-217-2015, 2015
Short summary
Short summary
In this paper we show that for radially symmetric piezoceramic disks non-zero sensitivity of the electrical impedance to the whole material parameter set can be computed using a system of 3-ring electrodes and non-uniform electrical excitation. We formulate an optimisation problem for increasing this sensitivity. However, the system displays multiple optimal configurations for the radii of said ring electrodes and we have shown some results from optimising such configurations using simulations.
F. Roth, C. Schmerbauch, E. Ionescu, N. Nicoloso, O. Guillon, and R. Riedel
J. Sens. Sens. Syst., 4, 133–136, https://doi.org/10.5194/jsss-4-133-2015, https://doi.org/10.5194/jsss-4-133-2015, 2015
Short summary
Short summary
We report on the high-temperature piezoresistivity of carbon-containing silicon oxycarbide nanocomposites (C/SiOC). The piezoresistive behavior of the C/SiOC nanocomposites relies on the presence of dispersed nanocrystalline graphite and non-crystalline carbon domains. In comparison to highly ordered carbon, C/SiOC exhibits strongly enhanced sensitivities, even at high temperatures. Thus, k values of ca. 80 at the highest temperature reading, 1200°C, reveal that C/SiOC is a primary candidate.
P. Gembaczka, M. Görtz, Y. Celik, A. Jupe, M. Stühlmeyer, A. Goehlich, H. Vogt, W. Mokwa, and M. Kraft
J. Sens. Sens. Syst., 3, 335–347, https://doi.org/10.5194/jsss-3-335-2014, https://doi.org/10.5194/jsss-3-335-2014, 2014
F. Di Maggio, M. Ling, A. Tsang, J. Covington, J. Saffell, and C. Blackman
J. Sens. Sens. Syst., 3, 325–330, https://doi.org/10.5194/jsss-3-325-2014, https://doi.org/10.5194/jsss-3-325-2014, 2014
E. Dilonardo, M. Penza, M. Alvisi, C. Di Franco, D. Suriano, R. Rossi, F. Palmisano, L. Torsi, and N. Cioffi
J. Sens. Sens. Syst., 3, 245–252, https://doi.org/10.5194/jsss-3-245-2014, https://doi.org/10.5194/jsss-3-245-2014, 2014
Short summary
Short summary
Electrochemically synthesized colloidal Au NPs with controlled dimension and composition were successfully deposited electrophoretically on CNT networked films. Au NP/CNT films were tested as active layers in resistive NO2 sensors, exhibiting a p-type response and a sensitivity depending on Au loading. The impact of the Au loading on gas sensing performance was investigated as a function of the working temperature, gas concentration and interfering gases.
A. Hosoya, S. Tamura, and N. Imanaka
J. Sens. Sens. Syst., 3, 141–144, https://doi.org/10.5194/jsss-3-141-2014, https://doi.org/10.5194/jsss-3-141-2014, 2014
A. Nocke
J. Sens. Sens. Syst., 2, 127–135, https://doi.org/10.5194/jsss-2-127-2013, https://doi.org/10.5194/jsss-2-127-2013, 2013
Cited articles
Benes, E. Gröschl, M. Burger, W., and Schmid, M.: Sensors based on
piezoelectric resonators, Sens. Act. A, 48, 1–21, https://doi.org/10.1016/0924-4247(95)00846-2, 1995.
Bjørheim, T. S., Haugsrud, R., and Norby, T.: Protons in acceptor doped
langasite, La3Ga5SiO14, Solid State Ion., 264, 76–84,
https://doi.org/10.1016/j.ssi.2014.05.017, 2014.
Bohm, J., Heimann, R. B., Hengst, M., Roewer, R., and Schindler, J.:
Czochralski growth and characterization of piezoelectric single crystals
with langasite structure: La3Ga5SiO14 (LGS),
La3Ga5.5Nb0.5O14 (LGN), and
La3Ga5.5Ta0.5O14 (LGT): Part I, J. Cryst. Grow., 204, 128–136, https://doi.org/10.1016/S0022-0248(99)00186-4, 1999.
Brauer, G.: Handbuch der Präparativen Anorganischen Chemie, 3rd Edn.,
Ferdinand Enke Verlag, Stuttgart, Germany, https://doi.org/10.1002/maco.19620131132, 1975.
Brown, M. E. and Gallagher, P. K.: Handbook of Thermal Analysis and Calorimetry, 1st Edn., Elsevier Science B.V., Amsterdam, the Netherlands, 1998.
Edvardsson, M., Rodahl, M., and Hook, F.: Investigation of binding event
perturbations caused by elevated QCM-D oscillation amplitude, Analyst, 131,
822–828, https://doi.org/10.1039/b601800a, 2006.
Firebaugh, S. L., Jensen, K. F., and Schmidt, M. A.: Investigation of
high-temperature degradation of platinum thin films with an in situ resistance measurement apparatus, J. Microelectromech. S., 7, 128–135,
https://doi.org/10.1109/84.661395, 1998.
Fritze, H.: High-temperature bulk acoustic wave sensors, Meas. Sci. Technol., 22, 012002–012030, https://doi.org/10.1088/0957-0233/22/1/012002, 2010.
Fritze, H.: High temperature piezoelectric materials: Defect chemistry and
electro-mechanical properties, J. Electroceram., 17, 625–630,
https://doi.org/10.1007/s10832-006-9735-1, 2006.
Fritze, H., Schulz, M., Seh, H., and Tuller, H. L.: Sensor application-related defect chemistry and electromechanical properties of
langasite, Solid State Ion., 177, 2313–2316, https://doi.org/10.1016/j.ssi.2006.02.008, 2006.
Gadkari, P. R., Warren, A. P., Todi, R. M., Petrova, R. V., and Coffey, K. R.: Comparison of the agglomeration behavior of thin metallic films on
SiO2, J. Vac. Sci. Technol. A, 23, 1152, https://doi.org/10.1116/1.1861943, 2005.
Haruta, H.: Agilent technologies impedance measurement handbook, 2nd Edn.,
Agilent Technologies Co. Ltd, USA, 2000.
Ikeda, T.: Fundamentals of Piezoelectricity, 1st Edn., Oxford University
Press, New York, USA, 1990.
Kreider, K. and Gillen, G.: High temperature materials for thin-film
thermocouples on silicon wafers, Thin Solid Films, 376, 32–37, https://doi.org/10.1016/S0040-6090(00)01346-8, 2000.
Kugaenko, O. M., Uvarova, S. S., Krylov, S. A., Senatulin, B. R., Petrakov, V. S., Buzanov, O. A., Egorov, V. N., and Sakharov, S. A.: Basic thermophysical parameters of langasite (La3Ga5SiO14),
langatate (La3Ta0.5Ga5.5O14), and catangasite
(Ca3TaGa3Si2O14) single crystals in a temperature range
of 25 to 1000 ∘C, Bull. Russ. Acad. Sci.: Phys., 76, 1258–1263, https://doi.org/10.3103/s1062873812110123, 2012.
Lee, S., Chu, C.-L., Tsai, M.-J., and Lee, J.: High temperature oxidation
behavior of interconnect coated with LSCF and LSM for solid oxide fuel cell
by screen printing, Appl. Surf. Sci., 256, 1817–1824, https://doi.org/10.1016/j.apsusc.2009.10.013, 2010.
Ohsato, H.: Origin of Piezoelectricity on Langasite, in: Materials Science
and Technology, edited by: Hutagalung, S., IntechOpen, Rijeka, Croatia, 15–40, https://doi.org/10.5772/2223, 2012.
Omelcenko, A., Wulfmeier, H., Albrecht, D., El Mofid, W., Ivanov, S., Bund, A., and Fritze, H.: Thin-film calorimetry: In-situ characterization of materials for lithium-ion batteries, Int. J. Mater. Res., 108, 904–919,
https://doi.org/10.3139/146.111551, 2017.
Richter, D., Sakharov, S., Forsén, E., Mayer, E., Reindl, L., and Fritze, H.: Thin Film Electrodes for High Temperature Surface Acoustic Wave Devices, Proced. Eng., 25, 168–171, https://doi.org/10.1016/j.proeng.2011.12.042, 2011.
Richter, D., Schulz, M., Sakharov, S., Davis, Z. J., and Fritze, H.: Surface
Acoustic Wave Devices: Materials Stability in Harsh Environments, Mater. Res. Soc. Symp. Proc., 1519, mrsf12-1519-mm03-29, https://doi.org/10.1557/opl.2012.1716, 2013.
Sauerwald, J., Richter, D., Ansorge, E., Schmidt, B., and Fritze, H.: Langasite based miniaturized functional structures: Preparation, high-temperature properties and applications, Phys. Status Solidi A, 208,
390–403, https://doi.org/10.1002/pssa.201026639, 2011.
Schaumburg, H.: Keramik, 1st Edn., B. G. Teubner, Stuttgart, Germany, 1994.
Schmidtchen, S., Richter, D., and Fritze, H.: Variation of the vibration
profile of piezoelectric resonant sensors with different electrode
conductivity at high temperatures, Sens. Act. B, 187, 247–253,
https://doi.org/10.1016/j.snb.2012.11.015, 2013.
Schröder, S., Fritze, H., Bishop, S., Chen, D., and Tuller, H. L.:
Thin-film nano-thermogravimetry applied to praseodymium-cerium oxide films
at high temperatures, Appl. Phys. Lett., 112, 213502, https://doi.org/10.1063/1.5025389, 2018.
Schulz, M. and Fritze, H.: Electromechanical properties of langasite resonators at elevated temperatures, J. Renew. Energ., 33, 336–341,
https://doi.org/10.1016/j.renene.2007.05.016, 2008.
Schulz, M., Fritze, H., and Stenzel, C.: Measurement and control of oxygen
partial pressure at elevated temperatures, Sens. Actuat. B, 187, 503–508, https://doi.org/10.1016/j.snb.2013.02.115, 2013.
Seh, H. and Tuller, H. L.: Defects and transport in langasite I: Acceptor-doped (La3Ga5SiO14), J. Electroceram., 16, 115–125, https://doi.org/10.1007/s10832-006-4081-x, 2006.
Seh, H., Tuller, H. L., and Fritze, H.: Defect properties of langasite and
effects on BAW gas sensor performance at high temperatures, J. Eur. Ceram.
Soc., 24, 1425–1429, https://doi.org/10.1016/S0955-2219(03)00464-3, 2004.
Shewmon, P. G.: Diffusion in Solids, McGraw-Hill, New York, USA, 1963.
Shimamura, K., Takeda, H., Kohno, T., and Fukuda, T.: Growth and characterization of lanthanum gallium silicate La3Ga5SiO14
single crystals for piezoelectric applications, J. Cryst. Grow., 163, 388–392, https://doi.org/10.1016/0022-0248(95)01002-5, 1996.
Spieß, L., Teichert, G., Schwarzer, R., Behnken, H., and Genzel, C.:
Moderne Röntgenbeugung, 2nd Edn., Vieweg+Teubner, GMV Fachverlage GmbH, Wiesbaden, https://doi.org/10.1007/978-3-8349-9434-9, 2009.
Suhak, Y., Schulz, M., Richter, D., and Fritze, H.: High-Temperature Acoustical and Electrical Properties of LGS, LGT and CTGS Resonators, Sol.
St. Phen., 230, 267–272, https://doi.org/10.4028/www.scientific.net/SSP.230.267, 2015.
Suhak, Y., Schulz, M., Wulfmeier, H., Johnson, W. L., Sotnikov, A., Schmidt,
H., Ganschow, S., Klimm, D., and Fritze, H.: Langasite-Type Resonant Sensors
for Harsh Environments, MRS Adv., 1, 1513–1518, https://doi.org/10.1557/adv.2016.109, 2016.
Thiele, J. A. and Pereira da Chunha, M.: High temperature LGS SAW gas sensor,
Sens. Actuat. B, 113, 816–822, https://doi.org/10.1016/j.snb.2005.03.071, 2006.
Tuller, H. L. and Fritze, H.: U.S. Patent No. 6 370 955, 16 April 2002.
Wang, Z., Yuan, D., Cheng, Z., Duan, X., Sun, H., Shi, X., Wei, X., Lü,
Y., Xu, D., Lü, M., and Pan, L.: Growth of a new ordered langasite structure compound Ca3TaGa3Si2O14 single crystal, J. Cryst. Grow., 253, 398–403, https://doi.org/10.1016/S0022-0248(03)01111-4, 2003.
Wulfmeier, H., Albrecht, D., Ivanov, S., Fischer, J., Ulrich, S., Bund, A.,
and Fritze, H.: High-temperature thin-film calorimetry: a newly developed
method applied to lithium ion battery materials, J. Mater. Sci. 48, 6585–6596, https://doi.org/10.1007/s10853-013-7455-x, 2013.
Wulfmeier, H., Albrecht, D., Fischer, J., Ivanov, S., Bund, A., Ulrich, S.,
and Fritze, H.: Thin-Film Calorimetry: Analytical Tool for In-Situ
Characterization of Lithium Ion Batteries, J. Electrochem. Soc., 162, A727–A736, https://doi.org/10.1149/2.0741504jes, 2015.
Wulfmeier, H., Omelcenko, A., Albrecht, D., Klimm, D., El Mofid, W., Strafela, M., Ulrich, S., Bund, A., and Fritze, H.: Thermal Stability of
Materials for Thin-Film Electrochemical Cells Investigated by Thin-Film
Calorimetry, MRS Adv., 1, 1043–1049, https://doi.org/10.1557/adv.2016.72, 2016.
Wulfmeier, H., Feder, R., Zhao, L., and Fritze, H.: Epitaxial Piezoelectric
Langasite Thin Films for High-Temperature Application, MRS Adv., 4, 523–529, https://doi.org/10.1557/adv.2019.90, 2019.
Yu, F., Zhang, Sh., Zhao, X., Yuan, D., Qin, L., Wang, Q.-M., and Shrout, T.
R.: Investigation of Ca3TaGa3Si2O14 piezoelectric crystals for high temperature sensors, J. Appl. Phys., 109, 114103,
https://doi.org/10.1063/1.3592347, 2011.
Zhao, L., Feder, R., and Fritze, H.: Abscheidung von Langasit mittels Laserablation zur Herstellung hochtemperaturstabiler piezoelektrischer
Sensorschichten, in: Proceedings 13. Dresdner Sensor-Symposium, Dresden, 188–193, https://doi.org/10.5162/13dss2017/P2.03, 2017.
Short summary
Epitaxially grown electrodes for high-temperature stable piezoelectric transducers are prepared by pulsed laser depostion. To adjust the stoichiometry in the films, oxygen partial pressure, target composition and deposition temperature are varied. Langasite films with enhanced conductivity are deposited, serving as electrodes for nearly monolithic piezoelectric resonators. These resonators show strong admittance maxima for their 1st, 3rd and 5th harmonics and are not affected by spurious modes.
Epitaxially grown electrodes for high-temperature stable piezoelectric transducers are prepared...
