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JSSS | Articles | Volume 8, issue 1
J. Sens. Sens. Syst., 8, 37-48, 2019
https://doi.org/10.5194/jsss-8-37-2019
© Author(s) 2019. This work is distributed under
the Creative Commons Attribution 4.0 License.

Special issue: Sensors and Measurement Systems 2018

J. Sens. Sens. Syst., 8, 37-48, 2019
https://doi.org/10.5194/jsss-8-37-2019
© Author(s) 2019. This work is distributed under
the Creative Commons Attribution 4.0 License.

Regular research article 14 Jan 2019

Regular research article | 14 Jan 2019

Phase optimization of thermally actuated piezoresistive resonant MEMS cantilever sensors

Andi Setiono et al.
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Al horr, Y., Arif, M., Katafygiotou, M., Mazroei, A., Kaushik, A., and Elsarrag, E.: Impact of indoor environmental quality on occupant well-being and comfort: A review of the literature, International Journal of Sustainable Built Environment, 5, 1–11, https://doi.org/10.1016/j.ijsbe.2016.03.006, 2016. 
Bausells, J.: Piezoresistive cantilevers for nanomechanical sensing, Microelectron. Eng., 145, 9–20, https://doi.org/10.1016/j.mee.2015.02.010, 2015. 
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Bertke, M., Wu, W., Wasisto, H. S., Uhde, E., and Peiner, E.: Size-selective electrostatic sampling and removal of nanoparticles on silicon cantilever sensors for air-quality monitoring, in: 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), Kaohsiung, Taiwan, IEEE, 1493–1496, 2017b. 

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In this work, methods to reveal a symmetrical amplitude shape from the asymmetric behavior in thermally actuated piezoresistive cantilever sensors are proposed. The symmetrical amplitude shape should then be accompanied by a monotonic phase response. With the monotonic phase response, real-time frequency tracking can be easier to implement using a phase-locked-loop (PLL) system.
In this work, methods to reveal a symmetrical amplitude shape from the asymmetric behavior in...
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