Articles | Volume 8, issue 2
https://doi.org/10.5194/jsss-8-293-2019
© Author(s) 2019. This work is distributed under the Creative Commons Attribution 4.0 License.
Regular research article
| 
09 Oct 2019
Regular research article |
| 09 Oct 2019
| 09 Oct 2019
A two-port electrothermal model for suspended MEMS device structures with multiple inputs
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