13 citations as recorded by crossref.

1. Resolution enhancement through nearfield-assistance in interference microscopy L. Hüser & P. Lehmann 10.1515/teme-2020-0013
2. Miniaturized interferometric confocal distance sensor for surface profiling with data rates at ultrasonic frequencies S. Hagemeier et al. 10.1088/1361-6501/acaf97
3. Electromagnetic modeling of interference, confocal, and focus variation microscopy T. Pahl et al. 10.1117/1.APN.3.1.016013
4. A novel cubic‐exp evaluation algorithm considering non‐symmetrical axial response signals of confocal microscopes S. Hagemeier et al. 10.1002/jemt.24376
5. Mirau-Based CSI with Oscillating Reference Mirror for Vibration Compensation in In-Process Applications H. Serbes et al. 10.3390/app11209642
6. Three-Dimensional Transfer Functions of Interference Microscopes P. Lehmann et al. 10.3390/metrology1020009
7. Investigation of measurement data of low-coherence interferometry at tilted surfaces in the 3D spatial frequency domain M. Künne et al. 10.1515/teme-2021-0137
8. Microsphere-assisted interference microscopy for resolution enhancement L. Hüser & P. Lehmann 10.1515/teme-2020-0101
9. 3D modeling of coherence scanning interferometry on 2D surfaces using FEM T. Pahl et al. 10.1364/OE.411167
10. Kombination eines neuartigen Doppelpuls-RGB-Interferometers mit einem Hartmann-Shack-Wellenfrontsensor zur dynamischen flächenhaften Topographieerfassung P. Gollor et al. 10.1515/teme-2020-0018
11. A 3-DoF motion error measurement system based on film interferometry F. Cheng et al. 10.1016/j.measurement.2023.113131
12. Modeling of fiber-coupled confocal and interferometric confocal distance sensors M. Siebert et al. 10.1088/1361-6501/ac5f29
13. Rigorous 3D modeling of confocal microscopy on 2D surface topographies T. Pahl et al. 10.1088/1361-6501/abfd69