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Journal of Sensors and Sensor Systems An open-access peer-reviewed journal
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Volume 7, issue 1
J. Sens. Sens. Syst., 7, 281-288, 2018
https://doi.org/10.5194/jsss-7-281-2018
© Author(s) 2018. This work is distributed under
the Creative Commons Attribution 4.0 License.

Special issue: Sensor/IRS2 2017

J. Sens. Sens. Syst., 7, 281-288, 2018
https://doi.org/10.5194/jsss-7-281-2018
© Author(s) 2018. This work is distributed under
the Creative Commons Attribution 4.0 License.

Regular research article 16 Apr 2018

Regular research article | 16 Apr 2018

Thin-film SnO2 and ZnO detectors of hydrogen peroxide vapors

Vladimir Aroutiounian1, Valeri Arakelyan1, Mikayel Aleksanyan1, Gohar Shahnazaryan1, Petr Kacer2, Pavel Picha2, Jiri Kovarik2, Jakub Pekarek2, and Berndt Joost3 Vladimir Aroutiounian et al.
  • 1Department of Physics of Semiconductors and Microelectronics, Yerevan State University, 1 A. Manoogian St., Yerevan, 0025, Republic of Armenia
  • 2Department of Organic Technology, University of Chemistry and Technology, Technická 5, 166 28 Prague 6, Czech Republic
  • 3Institute for Pharmaceutical Technology, Fachhochschule Nordwestschweiz, Hochschule für Life Sciences, Gründenstrasse 40, 4132 Muttenz, Switzerland

Abstract. Thin-film hydrogen peroxide vapor sensors made from Co-doped SnO2 and La-doped ZnO were manufactured using the high-frequency magnetron sputtering method. Thicknesses of deposited doped metal oxide films were measured and their morphology was investigated. The gas sensing characteristics of the prepared sensors were measured at different concentrations of hydrogen peroxide vapors and different operating temperatures of the sensor. It was found that both sensors made from doped metal oxides SnO2 and ZnO exhibit a sufficient response to 10ppm of hydrogen peroxide vapors at the 200 and 220C operating temperature, respectively. It was established that the dependencies of the response on hydrogen peroxide vapor concentration have a linear character for prepared structures at the 150C operating temperature and can be used for determination of hydrogen peroxide vapor concentration.

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Some results of the solid-state hydrogen peroxide vapor sensors made from semiconductor doped metal oxide nanostructured films have been presented during the international conference in Nuremberg. In this paper the extended version of our investigations of the detectors of hydrogen peroxide vapors are presented. The prepared sensors exhibit a response to very low concentration of hydrogen peroxide vapors. These detectors can be used in medicine, pharmacology, food and the textile industry.
Some results of the solid-state hydrogen peroxide vapor sensors made from semiconductor doped...
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