TY - JOUR A1 - Giebel, F. J. A1 - Köhle, M. A1 - Stramm, T. A1 - Kallis, K. T. A1 - Fiedler, H. L. T1 - Concept for a MEMS-type vacuum sensor based on electrical conductivity measurements JO - J. Sens. Sens. Syst. J1 - JSSS VL - 6 IS - 2 SP - 367 EP - 374 Y1 - 2017/11/16 PB - Copernicus Publications SN - 2194-878X UR - https://jsss.copernicus.org/articles/6/367/2017/ L1 - https://jsss.copernicus.org/articles/6/367/2017/jsss-6-367-2017.pdf DO - 10.5194/jsss-6-367-2017 ER -