Journal of Sensors and Sensor Systems
Journal of Sensors and Sensor Systems
JSSS
Articles | Volume 6, issue 2
Articles | Volume 6, issue 2
https://doi.org/10.5194/jsss-6-367-2017
© Author(s) 2017. This work is distributed under
the Creative Commons Attribution 3.0 License.
Special issue:
https://doi.org/10.5194/jsss-6-367-2017
© Author(s) 2017. This work is distributed under
the Creative Commons Attribution 3.0 License.
Articles | Volume 6, issue 2
Regular research article
 | 
16 Nov 2017
Regular research article |  | 16 Nov 2017

Concept for a MEMS-type vacuum sensor based on electrical conductivity measurements

Friederike Julia Giebel, Marcel Köhle, Till Stramm, Klaus T. Kallis, and Horst L. Fiedler

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Latest update: 18 Apr 2024
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Short summary
This article introduces a new idea for a micro vacuum sensor. The measuring principle of the sensor is to measure the electrical conductivity of the residual gas in a vacuum chamber. The conductivity is measured between two electrodes that are only 300 nm apart. It has been shown that this type of sensor allows vacuum pressure measurement from atmospheric pressure to high vacuum at very low voltages.
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Special issue
Sensors and Measurement Systems 2016