Articles | Volume 6, issue 2
https://doi.org/10.5194/jsss-6-285-2017
https://doi.org/10.5194/jsss-6-285-2017
Regular research article
 | 
22 Aug 2017
Regular research article |  | 22 Aug 2017

An ultra-low noise capacitance to voltage converter for sensor applications in 0.35  µm CMOS

Alexander Utz, Christian Walk, Norbert Haas, Tatjana Fedtschenko, Alexander Stanitzki, Mir Mokhtari, Michael Görtz, Michael Kraft, and Rainer Kokozinski

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Cited articles

Aaltonen, L. and Halonen, K.: Continuous-time interface for a micromachined capacitive accelerometer with {NEA} of 4 g and bandwidth of 300 hz, Sensors Actuat. A, 154, 46–56, 2009.
Amini, B. V. and Ayazi, F.: A 2.5-v 14-bit sigma; delta; cmos soi capacitive accelerometer, IEEE J. Solid-State Circ., 39, 2467–2476, 2004.
Ana: Noise and Operational Amplifier Circuits, appl. note an-358 Edn., n.d.
Bernstein, J., Miller, R., Kelley, W., and Ward, P.: Low-noise mems vibration sensor for geophysical applications, J. Microelectromech. Syst., 8, 433–438, 1999.
Chau, H.-L. and Wise, K. D.: Noise due to brownian motion in ultrasensitive solid-state pressure sensors, IEEE T. Elect. Devic., 34, 859–865, 1987.
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