Journal cover Journal topic
Journal of Sensors and Sensor Systems An open-access peer-reviewed journal
J. Sens. Sens. Syst., 4, 1-8, 2015
https://doi.org/10.5194/jsss-4-1-2015
© Author(s) 2015. This work is distributed under
the Creative Commons Attribution 3.0 License.
Regular research article
06 Jan 2015
Catalytic metal-gate field effect transistors based on SiC for indoor air quality control
D. Puglisi1, J. Eriksson1, C. Bur1,2, A. Schuetze2, A. Lloyd Spetz1, and M. Andersson1 1Department of Physics, Chemistry and Biology, Applied Sensor Science, Linköping University, 58183 Linköping, Sweden
2Department of Physics and Mechatronics Engineering, Lab for Measurement Technology, Saarland University, 66123 Saarbruecken, Germany
Abstract. High-temperature iridium-gated field effect transistors based on silicon carbide have been used for sensitive detection of specific volatile organic compounds (VOCs) in concentrations of health concern, for indoor air quality monitoring and control. Formaldehyde, naphthalene, and benzene were studied as hazardous VOCs at parts per billion (ppb) down to sub-ppb levels. The sensor performance and characteristics were investigated at a constant temperature of 330 °C and at different levels of relative humidity up to 60%, showing good stability and repeatability of the sensor response, and excellent detection limits in the sub-ppb range.

Citation: Puglisi, D., Eriksson, J., Bur, C., Schuetze, A., Lloyd Spetz, A., and Andersson, M.: Catalytic metal-gate field effect transistors based on SiC for indoor air quality control, J. Sens. Sens. Syst., 4, 1-8, https://doi.org/10.5194/jsss-4-1-2015, 2015.

Publications Copernicus
Download
Short summary
This study aims at the development of high-performance and cost-efficient gas sensors for sensitive detection of three specific hazardous gases, i.e., formaldehyde, naphthalene, and benzene, commonly present in indoor environments in concentrations of health concern. We used silicon carbide field effect transistors to investigate the sensor performance and characteristics under different levels of relative humidity up to 60%, demonstrating excellent detection limits in the sub-ppb range.
This study aims at the development of high-performance and cost-efficient gas sensors for...
Share