Articles | Volume 3, issue 2
https://doi.org/10.5194/jsss-3-335-2014
https://doi.org/10.5194/jsss-3-335-2014
Regular research article
 | 
19 Dec 2014
Regular research article |  | 19 Dec 2014

Encapsulation of implantable integrated MEMS pressure sensors using polyimide epoxy composite and atomic layer deposition

P. Gembaczka, M. Görtz, Y. Celik, A. Jupe, M. Stühlmeyer, A. Goehlich, H. Vogt, W. Mokwa, and M. Kraft

Viewed

Total article views: 2,719 (including HTML, PDF, and XML)
HTML PDF XML Total BibTeX EndNote
994 1,481 244 2,719 107 113
  • HTML: 994
  • PDF: 1,481
  • XML: 244
  • Total: 2,719
  • BibTeX: 107
  • EndNote: 113
Views and downloads (calculated since 19 Dec 2014)
Cumulative views and downloads (calculated since 19 Dec 2014)

Cited

Latest update: 28 Mar 2024