Articles | Volume 3, issue 2
https://doi.org/10.5194/jsss-3-167-2014
https://doi.org/10.5194/jsss-3-167-2014
Regular research article
 | 
08 Aug 2014
Regular research article |  | 08 Aug 2014

Fabrication and characterization of a piezoresistive humidity sensor with a stress-free package

T. Waber, M. Sax, W. Pahl, S. Stufler, A. Leidl, M. Günther, and G. Feiertag

Related authors

Evaluation of the pH-sensitive swelling of a hydrogel by means of a plasmonic sensor substrate
Christoph Kroh, Roland Wuchrer, Margarita Günther, Thomas Härtling, and Gerald Gerlach
J. Sens. Sens. Syst., 7, 51–55, https://doi.org/10.5194/jsss-7-51-2018,https://doi.org/10.5194/jsss-7-51-2018, 2018
Short summary
Implantable biomedical sensor array with biocompatible hermetic encapsulation
Carola Jorsch, Ulrike Schmidt, David Ulkoski, Carmen Scholz, Margarita Guenther, and Gerald Gerlach
J. Sens. Sens. Syst., 5, 229–235, https://doi.org/10.5194/jsss-5-229-2016,https://doi.org/10.5194/jsss-5-229-2016, 2016

Related subject area

Sensor technologies: Characterization and testing
Precise characterization of VCSEL in the 1550 nm band having a wavelength tuning range of 12 nm within 10 µs as light sources for fast sensor systems
Roman Kruglov, Gregor Saur, and Rainer Engelbrecht
J. Sens. Sens. Syst., 11, 161–169, https://doi.org/10.5194/jsss-11-161-2022,https://doi.org/10.5194/jsss-11-161-2022, 2022
Short summary
An algorithmic method for the identification of wood species and the classification of post-consumer wood using fluorescence lifetime imaging microscopy
Nina Leiter, Maximilian Wohlschläger, Martin Versen, and Christian Laforsch
J. Sens. Sens. Syst., 11, 129–136, https://doi.org/10.5194/jsss-11-129-2022,https://doi.org/10.5194/jsss-11-129-2022, 2022
Short summary
High-temperature behavior of housed piezoelectric resonators based on CTGS
Michal Schulz, Rezvan Ghanavati, Fabian Kohler, Jürgen Wilde, and Holger Fritze
J. Sens. Sens. Syst., 10, 271–279, https://doi.org/10.5194/jsss-10-271-2021,https://doi.org/10.5194/jsss-10-271-2021, 2021
Short summary
Investigation of a metrological atomic force microscope system with a combined cantilever position, bending and torsion detection system
Yiting Wu, Elisa Wirthmann, Ute Klöpzig, and Tino Hausotte
J. Sens. Sens. Syst., 10, 171–177, https://doi.org/10.5194/jsss-10-171-2021,https://doi.org/10.5194/jsss-10-171-2021, 2021
Short summary
Novel, low-cost device to simultaneously measure the electrical conductivity and the Hall coefficient from room temperature up to 600 °C
Robin Werner, Jaroslaw Kita, Michael Gollner, Florian Linseis, and Ralf Moos
J. Sens. Sens. Syst., 10, 71–81, https://doi.org/10.5194/jsss-10-71-2021,https://doi.org/10.5194/jsss-10-71-2021, 2021
Short summary

Cited articles

Bosch: Sustainability in a Connected World is Bosch focus, International CES, Bosch press release, 2014.
Buchhold, R., Nakladal, A., Gerlach, G., Sahre, K., Müller, M., Eichhorn, K.-J., Herold, M., and Gauglitz, G.: A study on the microphysical mechanisms of adsorption in polyimide layers for microelectronic applications, J. Electrochem. Soc., 145, 4012–4018, 1998a.
Buchhold, R., Nakladal, A., Gerlach, G., Sahre, K., Eichhorn, K.-J., Herold, M., and Gauglitz, G.: Influence of moisture-uptake on mechanical properties of polymers used in microelectronics, MRS Proceedings, 511, 359–364, 1998b.
Buchhold, R., Nakladal, A., Gerlach, G., Sahre, K., Eichhorn, K.-J., and Müller, M.: Reduction of mechanical stress in micromachined components caused by humidity-induced volume expanison of polymer layers, Microsystem Technol., 5, 3–12, 1998c.
Buchhold, R., Nakladal, A., Gerlach, G., and Neumann, P.: Design studies on pieoresistive humidity sensors, Sensors Actuators B, 53, 1–7, 1998d.
Download