Articles | Volume 6, issue 1
https://doi.org/10.5194/jsss-6-121-2017
https://doi.org/10.5194/jsss-6-121-2017
Regular research article
 | 
02 Mar 2017
Regular research article |  | 02 Mar 2017

Transferable micromachined piezoresistive force sensor with integrated double-meander-spring system

Gerry Hamdana, Maik Bertke, Lutz Doering, Thomas Frank, Uwe Brand, Hutomo Suryo Wasisto, and Erwin Peiner

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Cited articles

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Brand, U., Li, Z., Gao, S., Hahn, S., and Hiller, K.: Silicon double spring for the simultaneous calibration of probing forces and deflections in the micro range, Meas. Sci. Technol., 27, 15601, https://doi.org/10.1088/0957-0233/27/1/015601, 2016.
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