Articles | Volume 5, issue 1
https://doi.org/10.5194/jsss-5-95-2016
https://doi.org/10.5194/jsss-5-95-2016
Regular research article
 | 
30 Mar 2016
Regular research article |  | 30 Mar 2016

A micro-capacitive pressure sensor design and modelling

Ali E. Kubba, Ahmed Hasson, Ammar I. Kubba, and Gregory Hall

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Cited articles

A Measurement Specialties company Sensoric, Miniature SMD pressure sensor, Series Datasheet, available at: http://www.nickbelsondesign.co.uk/MS5401-AM.pdf (last access: 18 April 2012), 2009.
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Barlian, A. A., Park, W. T., Mallon, J. R., Rastegar, A. J., and Pruitt, B. L.: Review: Semiconductor Piezoresistance for Microsystems, Proceedings of the IEEE, 97, 513–552, 2009.
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This work presents a novel design of a low power high-temperature MEMS elliptical capacitive pressure sensor that can be utilized within wireless sensor systems, e.g. TPMS. Throughout numerical and analytical analysis, it was found that sensor sensitivity and temperature resistance could be increased if the diaphragm area has two symmetrical segments of chords parallel to the major axis removed, and if diaphragm deformation increases the separation distance between the sensing capacitor plates.