Articles | Volume 5, issue 1
https://doi.org/10.5194/jsss-5-85-2016
© Author(s) 2016. This work is distributed under
the Creative Commons Attribution 3.0 License.Special issue:
Investigation of low-temperature cofired ceramics packages for high-temperature SAW sensors
Abstract. Surface acoustic wave (SAW) temperature sensor devices have been developed for operating temperatures up to and above 1000 °C. A challenging task to make these devices available on the market is to develop an appropriate housing concept. A concept based on low-temperature cofired ceramics (LTCC) has been investigated and tested under elevated temperatures up to 600 °C. The devices showed promising results up to 450 °C. Thorough analysis of the possible failure mechanisms was done to increase the maximum temperature above this limit in further production cycles.