Regular research article
|
19 Dec 2014
Regular research article |
|
19 Dec 2014
Encapsulation of implantable integrated MEMS pressure sensors using polyimide epoxy composite and atomic layer deposition
P. Gembaczka, M. Görtz, Y. Celik, A. Jupe, M. Stühlmeyer, A. Goehlich, H. Vogt, W. Mokwa, and M. Kraft
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Latest update: 24 Apr 2024
