TY - JOUR A1 - Waber, T. A1 - Sax, M. A1 - Pahl, W. A1 - Stufler, S. A1 - Leidl, A. A1 - Günther, M. A1 - Feiertag, G. T1 - Fabrication and characterization of a piezoresistive humidity sensor with a stress-free package JO - J. Sens. Sens. Syst. J1 - JSSS VL - 3 IS - 2 SP - 167 EP - 175 Y1 - 2014/08/08 PB - Copernicus Publications SN - 2194-878X UR - https://jsss.copernicus.org/articles/3/167/2014/ L1 - https://jsss.copernicus.org/articles/3/167/2014/jsss-3-167-2014.pdf DO - 10.5194/jsss-3-167-2014 ER -